Durable platinum/polyimide sensing structures

The durability and reliability of a polymer layer/metal layer sensor structure is improved by the incorporation of a metal oxide, e.g., tantalum oxide (Ta2O5), layer between the polymer, e.g., polyimide, and the metal, e.g., platinum. sensor element.

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Bibliographische Detailangaben
Hauptverfasser:	TROXELL, JOHN RICHARD, HARRINGTON, CHARLES ROBERT, MARIE IRENE, SULTAN, MICHEL FARID
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The durability and reliability of a polymer layer/metal layer sensor structure is improved by the incorporation of a metal oxide, e.g., tantalum oxide (Ta2O5), layer between the polymer, e.g., polyimide, and the metal, e.g., platinum. sensor element.