Method of producing semiconductor wafer

A system for producing a semiconductor wafer includes a production progress comparing/calculating unit, a fabrication device status monitor step, an inventory control step, and a process shelf controller step. In response to a timing signal from the fabrication device status monitor step, the produc...

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Bibliographische Detailangaben
Hauptverfasser:	TOGASHI, YOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	A system for producing a semiconductor wafer includes a production progress comparing/calculating unit, a fabrication device status monitor step, an inventory control step, and a process shelf controller step. In response to a timing signal from the fabrication device status monitor step, the production progress comparing/calculating unit determines a semiconductor wafer to be processed next, and the determined semiconductor wafer is automatically searched for on a process shelf. The fabrication devices of a semiconductor wafer production line start processing semiconductor wafers at suitable times thereby producing semiconductor wafers according to a production plan and meeting a delivery time for the semiconductor wafers.