Inspection system and process

In order to reliably detect a defect on an inspected surface, electronic pictures of the inspected surface are formed at different positions by moving an imaging area relative to the inspected surface. Defect candidate regions are extracted from a series of the pictures. The system examines whether a movement from one candidate region to another candidate region is proportional to the movement of the imaging area. If the movement between the candidate regions is in proportion to the movement of the imaging area, the system judges that the candidate regions are imagery of a defect on the inspected surface.