Object measuring apparatus

An object measuring apparatus for measuring the dimensions of an object, and controlling the pushing pressure of a probe that makes contact with the measured object. A table is movably mounted on a base member, a drive unit includes armature coils on the base member and a field magnet on the table,...

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Hauptverfasser: TAKEI, SEIJI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An object measuring apparatus for measuring the dimensions of an object, and controlling the pushing pressure of a probe that makes contact with the measured object. A table is movably mounted on a base member, a drive unit includes armature coils on the base member and a field magnet on the table, and a probe is fastened to the table and driven along the base member by the drive unit. A linear magnetic scale is provided on the base member, and a magnetic sensor portion is provided on the table. A measuring position detection sensor on the probe detects the object to be measured. An output from the measuring position detection sensor indicating that an object has been detected, and the pulse output generated by relative movement of the sensor portion and the scale, are supplied to a processing unit to calculate the dimensions of the object. The thrust of the probe is nearly proportional to the drive current supplied to the armature coils, so that the thrust of the probe unit can be controlled before determining the dimensions of the object.