Method of accurate compositional analysis of dielectric films on semiconductors

Method of accurate compositional analysis of dielectric films on semiconductors

A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.

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Hauptverfasser: ALVIS, ROGER L, ROMERO, JEREMIAS D, FATEMI, HOMI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator ALVIS
ROGER L
ROMERO
JEREMIAS D
FATEMI
HOMI
description A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US5707484A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US5707484A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US5707484A3</originalsourceid><addsrcrecordid>eNqFijEKAjEQAK-xEPUN5gOC4MnZiig2YqHWx7LZcAtJNmT3Cn_vCfY2MzDMvLnfyAbxToIDxLGCkUNJRZSNJUN0MOGtrN_FM0VCq4wucExTy04pMUr2I5pUXTazAFFp9fOiWV_Oz9N1Q0V60gJImax_PfbdtmsP7XH3__gAyuA3AA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method of accurate compositional analysis of dielectric films on semiconductors</title><source>esp@cenet</source><creator>ALVIS; ROGER L ; ROMERO; JEREMIAS D ; FATEMI; HOMI</creator><creatorcontrib>ALVIS; ROGER L ; ROMERO; JEREMIAS D ; FATEMI; HOMI</creatorcontrib><description>A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>1998</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19980113&amp;DB=EPODOC&amp;CC=US&amp;NR=5707484A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19980113&amp;DB=EPODOC&amp;CC=US&amp;NR=5707484A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ALVIS; ROGER L</creatorcontrib><creatorcontrib>ROMERO; JEREMIAS D</creatorcontrib><creatorcontrib>FATEMI; HOMI</creatorcontrib><title>Method of accurate compositional analysis of dielectric films on semiconductors</title><description>A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1998</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqFijEKAjEQAK-xEPUN5gOC4MnZiig2YqHWx7LZcAtJNmT3Cn_vCfY2MzDMvLnfyAbxToIDxLGCkUNJRZSNJUN0MOGtrN_FM0VCq4wucExTy04pMUr2I5pUXTazAFFp9fOiWV_Oz9N1Q0V60gJImax_PfbdtmsP7XH3__gAyuA3AA</recordid><startdate>19980113</startdate><enddate>19980113</enddate><creator>ALVIS; ROGER L</creator><creator>ROMERO; JEREMIAS D</creator><creator>FATEMI; HOMI</creator><scope>EVB</scope></search><sort><creationdate>19980113</creationdate><title>Method of accurate compositional analysis of dielectric films on semiconductors</title><author>ALVIS; ROGER L ; ROMERO; JEREMIAS D ; FATEMI; HOMI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5707484A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1998</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>ALVIS; ROGER L</creatorcontrib><creatorcontrib>ROMERO; JEREMIAS D</creatorcontrib><creatorcontrib>FATEMI; HOMI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ALVIS; ROGER L</au><au>ROMERO; JEREMIAS D</au><au>FATEMI; HOMI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method of accurate compositional analysis of dielectric films on semiconductors</title><date>1998-01-13</date><risdate>1998</risdate><abstract>A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method of accurate compositional analysis of dielectric films on semiconductors
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T03%3A24%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ALVIS;%20ROGER%20L&rft.date=1998-01-13&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS5707484A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true