Stage driving apparatus
A stage driving apparatus comprises a stage mounted with a sample and rotatable about an optical axis of an observation optical system for observing the sample, and two guides, for moving the stage within a plane perpendicular to the optical axis of the observation optical system, rotatable together...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A stage driving apparatus comprises a stage mounted with a sample and rotatable about an optical axis of an observation optical system for observing the sample, and two guides, for moving the stage within a plane perpendicular to the optical axis of the observation optical system, rotatable together with the stage and oriented orthogonal to each other. The apparatus further comprises an input device for inputting a signal representing a moving direction of the stage, a converter for converting a signal inputted to the input device on the basis of an observation image of the sample on the stage through the observation optical system into an output signal with a compensated relative rotational deviation between a moving direction defined by the observation image and a moving direction defined by the two guides and a driving device for moving the stage along the two guides on the basis of the output signal from the converter. |
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