Fine pitch bonding

In a bonding station, a tooling principle is provided wherein first and second tool parts respectively hold first and second apparatus parts, each apparatus part having fine conductor periodicity edge bonding regions, in superpositioned registration with the tool parts providing space and accessabil...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PALMER, MICHAEL JON, NARAYAN, CHANDRASEKHAR, HORTON, RAYMOND ROBERT
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:In a bonding station, a tooling principle is provided wherein first and second tool parts respectively hold first and second apparatus parts, each apparatus part having fine conductor periodicity edge bonding regions, in superpositioned registration with the tool parts providing space and accessability for optical alignment and for bonding heat and pressure. The tool members retain a first, position registered, apparatus part, with "X" - "Y" registration capability, in position with an edge bearing a fine conductor periodicity accessable by a tapered edge of the tool which permits optical fine alignment adjustment and bonding heat and pressure application.