Method of minimizing diffraction groove formation on laser etched surfaces

Laser radiation can be directed through an aperture to a target surface without causing the expected diffraction groove effect by moving the target relative to the stage to which the aperture is attached in such a fashion as to interrupt the diffraction pattern and minimize the production of diffrac...

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Bibliographische Detailangaben
Hauptverfasser: SHANNON, JOHN H, MCINTYRE, KEVIN J
Format: Patent
Sprache:eng
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Zusammenfassung:Laser radiation can be directed through an aperture to a target surface without causing the expected diffraction groove effect by moving the target relative to the stage to which the aperture is attached in such a fashion as to interrupt the diffraction pattern and minimize the production of diffraction grooves.