Trench isolation stress relief

Trench isolation stress relief

In a microelectronic device formed on a substrate 12, a pair of trenches 30, 36 connected at their intersection by trench 54 which is disposed at an obtuse angle with respect to each of the pair of trenches 30 and 36.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GAUL, STEPHEN JOSEPH, HEMMENWAY, DONALD FRANK
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:In a microelectronic device formed on a substrate 12, a pair of trenches 30, 36 connected at their intersection by trench 54 which is disposed at an obtuse angle with respect to each of the pair of trenches 30 and 36.