Stabilization of a patterned planarizing layer for solid state imagers prior to color filter pattern formation
A solid state image sensor is described which includes a planarizing layer incorporated into a means of color separation. The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remai...
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| creator | BLOOD JEFFREY CARLYLE DALY ROBERT CURTIS |
| description | A solid state image sensor is described which includes a planarizing layer incorporated into a means of color separation. The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remains on the completed device and is patterned to permit access to bonding pads. Negative photoresist materials, photoinitiated polymerization imaging systems and positive imaging systems may be selected for use as the planarizing layer. |
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The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remains on the completed device and is patterned to permit access to bonding pads. Negative photoresist materials, photoinitiated polymerization imaging systems and positive imaging systems may be selected for use as the planarizing layer.</description><edition>6</edition><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; PICTORIAL COMMUNICATION, e.g. TELEVISION ; SEMICONDUCTOR DEVICES</subject><creationdate>1997</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19970805&DB=EPODOC&CC=US&NR=5654202A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19970805&DB=EPODOC&CC=US&NR=5654202A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BLOOD; JEFFREY CARLYLE</creatorcontrib><creatorcontrib>DALY; ROBERT CURTIS</creatorcontrib><title>Stabilization of a patterned planarizing layer for solid state imagers prior to color filter pattern formation</title><description>A solid state image sensor is described which includes a planarizing layer incorporated into a means of color separation. The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remains on the completed device and is patterned to permit access to bonding pads. 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The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remains on the completed device and is patterned to permit access to bonding pads. Negative photoresist materials, photoinitiated polymerization imaging systems and positive imaging systems may be selected for use as the planarizing layer.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES |
| title | Stabilization of a patterned planarizing layer for solid state imagers prior to color filter pattern formation |
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