Stabilization of a patterned planarizing layer for solid state imagers prior to color filter pattern formation

A solid state image sensor is described which includes a planarizing layer incorporated into a means of color separation. The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remai...

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Bibliographische Detailangaben
Hauptverfasser:	BLOOD, JEFFREY CARLYLE, DALY, ROBERT CURTIS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A solid state image sensor is described which includes a planarizing layer incorporated into a means of color separation. The planarizing layer has been found to provide a smooth, uniform surface for coating and adhesion of a color separator within the active device area. The planarizing layer remains on the completed device and is patterned to permit access to bonding pads. Negative photoresist materials, photoinitiated polymerization imaging systems and positive imaging systems may be selected for use as the planarizing layer.