Interferometric detecting/imaging method based on multi-pole sensing

A method for detecting and/or imaging a workpiece. In a detection aspect, the method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe tip and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	O'BOYLE, MARTIN PATRICK, WICKRAMASINGHE, HEMANTHA KUMAR, MARTIN, YVES, ZENHAUSERN, FREDERIC
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A method for detecting and/or imaging a workpiece. In a detection aspect, the method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe tip and the workpiece; decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information; and, using the decoding information as a means for detecting the presence of the workpiece. In an imaging aspect, the method includes incorporating the previous steps in a scanning operation for developing an image representative of the workpiece.