Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks

A method for making a set of surface-emitting laser diodes comprises the making of reflectors by the epitaxial growth of at least one semiconductor material through a mask having apertures with inclined flanks. This method leads to the obtaining of the Bragg reflectors obtained in situ, removing the...

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Hauptverfasser: GARCIA, JEANARLES, HIRTZ, JEAN-PIERRE, MAUREL, PHILIPPE
Format: Patent
Sprache:eng
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Zusammenfassung:A method for making a set of surface-emitting laser diodes comprises the making of reflectors by the epitaxial growth of at least one semiconductor material through a mask having apertures with inclined flanks. This method leads to the obtaining of the Bragg reflectors obtained in situ, removing the need for the ion etching of a semiconductor substrate followed by a phase for the conditioning of the surface of the sample before the preparation of the desired laser structure. Application: optical power source.