Dielectric thin film device with lead erbium zirconate titanate

A dielectric thin film device is constructed by a dielectric thin film using lead erbium zirconate titanate represented by (Pb1-yEry) (ZrxTi1-x)O3 with 0

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Bibliographische Detailangaben
Hauptverfasser: MASUDA, YOSHIYUKI, OGIMOTO, YASUSHI, OOTANI, NOBORU
Format: Patent
Sprache:eng
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Zusammenfassung:A dielectric thin film device is constructed by a dielectric thin film using lead erbium zirconate titanate represented by (Pb1-yEry) (ZrxTi1-x)O3 with 0