Saw device having acoustic elements with diverse mass loading and method for forming same
A surface acoustic wave device (100), includes a piezoelectric substrate (105) having a surface acoustic wave structure with an acoustic region (130). An acoustic element (115) disposed in a portion (110) of the acoustic region (130), has a different mass loading than an acoustic element (122) dispo...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A surface acoustic wave device (100), includes a piezoelectric substrate (105) having a surface acoustic wave structure with an acoustic region (130). An acoustic element (115) disposed in a portion (110) of the acoustic region (130), has a different mass loading than an acoustic element (122) disposed in another portion (120) of the acoustic region (130). |
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