Laser system decontamination method and apparatus
A decontaminate apparatus for a laser system includes a laser having a compartment housing having a base and walls formed into a cavity and having a compartment cover having at least a portion thereof porous to predetermined gases used in laser system optical cavities. The compartment housing cavity...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A decontaminate apparatus for a laser system includes a laser having a compartment housing having a base and walls formed into a cavity and having a compartment cover having at least a portion thereof porous to predetermined gases used in laser system optical cavities. The compartment housing cavity is filled with a selected decontaminating material held therein by the porous cover and is attached in the laser system housing so that selected contamination in the laser system optical compartment gas is absorbed by the selected material in the compartment. The compartment cover can be made of a porous silica. A method of cleaning a laser optical cavity includes forming the housing having the cavity therein, selecting a decontaminate material, placing the selected decontaminate material into the housing, and forming and attaching a cover, at least a portion of which is porous to predetermined gases used in laser optical cavities, and attaching the housing with the selected material in the laser cavity so that selected contamination in the laser system optical cavity gas is absorbed by the selected material. |
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