Scanning probe microscope having a cantilever used therein

A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a pi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FUJII, TORU, FUJIU, TAKAMITSU, SANGO, YOSHINORI, NOMURA, TATSUSHI, WATANABE, SHUNJI
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.