Vertical electroetch tool nozzle and method

A nozzle is provided for use in electroetching a vertically oriented workpiece, comprising a housing having a top, sides, and bottom for creating a flow of etching solution on the workpiece, and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the wo...

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Bibliographische Detailangaben
Hauptverfasser:	BERRIDGE, KIRK G, DINAN, THOMAS E, PIKE, MICHAEL B, SHENOY, RAVINDRA V, KANARSKY, THOMAS S, DATTA, MADHAV
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR CHEMISTRY ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A nozzle is provided for use in electroetching a vertically oriented workpiece, comprising a housing having a top, sides, and bottom for creating a flow of etching solution on the workpiece, and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.