Cassette loader having compound translational motion

A cassette loading mechanism for semiconductor processing equipment reduces the possibility of repetitive stress injury that may occur as a result of repeatedly loading and unloading a cassette of substrates by eliminating manual cassette rotation. The loader receives a cassette and, by compound tra...

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Bibliographische Detailangaben
Hauptverfasser:	AMES, KENNETH D, FREERKS, FREDERIK W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A cassette loading mechanism for semiconductor processing equipment reduces the possibility of repetitive stress injury that may occur as a result of repeatedly loading and unloading a cassette of substrates by eliminating manual cassette rotation. The loader receives a cassette and, by compound translational movement, rotates the cassette about 90 DEG from a horizontal loading position, in which the substrates contained therein are positioned in a vertical orientation, to a position in which the substrates contained therein are positioned in a horizontal orientation, such that the cassette is aligned to the other components of the substrate handling system for substrate transfer. The cassette motions are interlocked with the cassette clamping mechanism and the cassette loader door and a cassette shuttle by pneumatic or electronic logic.