Torsion beam accelerometer with slotted tilt plate

Torsion beam accelerometer with slotted tilt plate

A capacitive-type torsion beam accelerometer sensor element exhibiting improved stability contains slots in the heavy side of the rotatable sensing element which serve to alter the geometry of the heavy side capacitor such that the electrical geometry substantially coincides with the physical geomet...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: STEPHAN, CRAIG H
Format: Patent
Sprache:eng
Schlagworte:
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A capacitive-type torsion beam accelerometer sensor element exhibiting improved stability contains slots in the heavy side of the rotatable sensing element which serve to alter the geometry of the heavy side capacitor such that the electrical geometry substantially coincides with the physical geometry of the substrate's fixed conductive plate in the presence of charge spreading. The slots also permit ingress and egress of air, thus extending the frequency response.