Etching a diamond body with a molten or partially molten metal

A diamond body, such as a CVD diamond film, is etched by immersion of the body in a molten or partially molten metal, such as the rare earth metal La or Ce. While the body is being etched, various portions of a major surface of the body can be protected for various time durations by masks against th...

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Hauptverfasser: DAUTREMONT-SMITH, WILLIAM C, GRAEBNER, JOHN E, JIN, SUNGHO, KATZ, AVISHAY
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A diamond body, such as a CVD diamond film, is etched by immersion of the body in a molten or partially molten metal, such as the rare earth metal La or Ce. While the body is being etched, various portions of a major surface of the body can be protected for various time durations by masks against the etching-whereby, after dicing the body, the resulting dies can be used as submounts for lasers with feedback.