Supercritical fluid cleaning apparatus without pressure vessel

A nozzle for generating a supercritical fluid from a cleaning fluid. The nozzle includes a mechanism for directing the supercritical fluid onto a surface of a part to be cleaned. The nozzle comprises a body having (a) an interior portion which includes a mechanism for generating the supercritical fl...

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Bibliographische Detailangaben
Hauptverfasser: CHAO, SIDNEY C, STANFORD, JR., THOMAS B, PALEN, EDWARD J, LEE, CHRIS
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A nozzle for generating a supercritical fluid from a cleaning fluid. The nozzle includes a mechanism for directing the supercritical fluid onto a surface of a part to be cleaned. The nozzle comprises a body having (a) an interior portion which includes a mechanism for generating the supercritical fluid by suitable temperature and pressure increase of the cleaning fluid; (b) an inlet portion for introducing the cleaning fluid into the interior portion; (c) an outlet portion for directing the supercritical fluid generated in the interior portion onto the surface of the part to be cleaned; and (d) counteracting mechanism for resisting high pressure that is produced during the generation of the supercritical fluid so as to permit the nozzle to be maintained a suitable distance from the surface of the part to be cleaned so that the supercritical fluid impinges on the surface.