Interdigital capacitor and method for making the same

The present invention relates to an interdigital capacitor and to a method for producing an interdigital capacitor having a finger structure of a coplanar stub line covered by an air bridge pocket for increasing the capacitance of the coplanar line. The air bridge pocket provides shielding for the c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BERTENBURG, RALF, KOSTER, NORBERT H. L, WOLFF, INGO, KOSSLOWSKI, STEFAN
Format: Patent
Sprache:eng
Schlagworte:
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