Interdigital capacitor and method for making the same

The present invention relates to an interdigital capacitor and to a method for producing an interdigital capacitor having a finger structure of a coplanar stub line covered by an air bridge pocket for increasing the capacitance of the coplanar line. The air bridge pocket provides shielding for the c...

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Bibliographische Detailangaben
Hauptverfasser:	BERTENBURG, RALF, KOSTER, NORBERT H. L, WOLFF, INGO, KOSSLOWSKI, STEFAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE WAVEGUIDES
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Beschreibung
Zusammenfassung:	The present invention relates to an interdigital capacitor and to a method for producing an interdigital capacitor having a finger structure of a coplanar stub line covered by an air bridge pocket for increasing the capacitance of the coplanar line. The air bridge pocket provides shielding for the capacitor structure. The disclosed manufacturing method includes producing a galvanic reinforcement of the center line of the coplanar line.