Method for forming wiring pattern

A wiring pattern forming method in which side etch of a wiring pattern at the time of etching the substrate copper foil of a copper plating pattern is reduced to hold down an increase in line resistance, the wiring pattern forming method including the steps of: providing a plating resist pattern of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKADA, TOSHINARI, YAMAMOTO, KANJI, KOBAYASHI, SHIRO, AKAHOSHI, HARUO, MIYAZAKI, TOMOYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A wiring pattern forming method in which side etch of a wiring pattern at the time of etching the substrate copper foil of a copper plating pattern is reduced to hold down an increase in line resistance, the wiring pattern forming method including the steps of: providing a plating resist pattern of which open area comprises a wiring pattern on the surface of a copper-clad laminate which is obtained by providing a copper foil on an insulating substrate; plating such open area with copper to form a copper plating pattern; then plating a crevice between the copper plating pattern and the plating resist pattern with a solder film by alternately repeating application of a current for a predetermined time period and suspension of the current application for a predetermined time period; and etching away the copper foil by using the solder film as an etching resist to form the wiring pattern.