Alignment transfer method

Prior to the press-contact between a pattern-transferring flat plate and a transfer-receiving flat plate, at least one of these flat plates is moved to a predetermined position to effect the positioning therebetween, while the positional relation between the pattern-transferring flat plate and the t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ASAKA, KENJI, TAKEUCHI, SATOSHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Prior to the press-contact between a pattern-transferring flat plate and a transfer-receiving flat plate, at least one of these flat plates is moved to a predetermined position to effect the positioning therebetween, while the positional relation between the pattern-transferring flat plate and the transfer-receiving flat plate is optically observed, and thereafter these flat plates are sequentially press-contacted to each other from an end of the flat plates. Therefore, there is no positional difference between the flat plates which have been correctly positioned, and further the adhesion strength between the transfer pattern and the transfer-receiving flat plate is uniform.