Quick cure exhaust manifold

The invention is directed to a manifold 10 that is used in conjunction with a die attach cure station for providing a "quick cure" of the die mount adhesive, and for forcing contaminants away from the semiconductor die 33 surface. The manifold has an air put port 21 directly above the semi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NYE, LARRY W, HEAD, MICHAEL R, ROMM, DOUGLAS W
Format: Patent
Sprache:eng
Schlagworte:
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