Method of forming optical light guides through silicon
A method of forming optical light guides through silicon is disclosed wherein such light guides extend from a first (or front) surface along a preferred crystallographic direction to a second (or back) surface.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of forming optical light guides through silicon is disclosed wherein such light guides extend from a first (or front) surface along a preferred crystallographic direction to a second (or back) surface. |
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