Method for manufacturing polycrystalline silicon thin-film solar cells

The present invention provides an improved method for manufacturing highly efficient and especially thin polycrystalline silicon thin-film solar cells. More particularly, the present invention provides a silicon nucleation layer produced on amorphous substrates with a nucleation layer being selectiv...

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Bibliographische Detailangaben
Hauptverfasser: ENDROES, ARTHUR, PLAETTNER, ROLF, EINZINGER, RICHARD, KRUEHLER, WOLFGANG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention provides an improved method for manufacturing highly efficient and especially thin polycrystalline silicon thin-film solar cells. More particularly, the present invention provides a silicon nucleation layer produced on amorphous substrates with a nucleation layer being selectively etched until uniformly orientated nuclei remain. A silicon thin-film grown thereover is coarse-crystalline, has grain boundaries residing perpendicular to the substrate and has a pyramid structure as a consequence of the uniform orientation. High photocurrents can already be achieved with solar cells manufactured therefrom beginning with a layer thickness of 10 mu m.