Gas flow controller
There is disclosed a system for delivering gas at a predetermined rate of flow, including a diaphgram type flow controller, a pressure regulator for providing a constant flow of gas to the flow controller, and a microprocessor controlled stepper motor utilizing an optical encoder to adjust the rate...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | There is disclosed a system for delivering gas at a predetermined rate of flow, including a diaphgram type flow controller, a pressure regulator for providing a constant flow of gas to the flow controller, and a microprocessor controlled stepper motor utilizing an optical encoder to adjust the rate of flow of a gas leaving the controller without having to use a gas flow measurement device to monitor the flow rate. |
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