Hollow waveguide for ultraviolet wavelength region laser beams

A hollow waveguide for ultraviolet wavelength region laser beams incorporates a glass tube composed of a glass material exhibiting a high transmissivity with respect to ultraviolet rays and an excellent environment resistant property, and a metal film exhibiting a high reflectivity with respect to the ultraviolet rays and formed outside the glass tube. The glass tube serves as an inner surface of the waveguide. The ultraviolet wavelength region laser beams are transmitted while being reflected by the inner surface of the glass tube and by an interface between the glass tube and the metal film.