Multilayer solid lubricant composite structures and method of making same
A composite, multilayer thin film solid lubricant structure having multiple thin film layers of solid lubricant interleaved by thin film interlayers which interrupt propagation of growth defects in the deposition process.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A composite, multilayer thin film solid lubricant structure having multiple thin film layers of solid lubricant interleaved by thin film interlayers which interrupt propagation of growth defects in the deposition process. |
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