ION SPUTTERING PUMP WITH GETTER MODULE

The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, i...

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Hauptverfasser:	KRISCHER, GUNTHER, ROMER, JOSEPH, MUNDINGER, HANS-JURGEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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creator	KRISCHER GUNTHER ROMER JOSEPH MUNDINGER HANS-JURGEN
description	The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.
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The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BLASTING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</subject><subject>PUMPS</subject><subject>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1993</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDz9PdTCA4IDQlxDfL0c1cICPUNUAj3DPFQcHcFiSn4-ruE-rjyMLCmJeYUp_JCaW4GeTfXEGcP3dSC_PjU4oLE5NS81JL40GBTIyNDQ0sDR2PCKgBTNSMJ</recordid><startdate>19930622</startdate><enddate>19930622</enddate><creator>KRISCHER; GUNTHER</creator><creator>ROMER; JOSEPH</creator><creator>MUNDINGER; HANS-JURGEN</creator><scope>EVB</scope></search><sort><creationdate>19930622</creationdate><title>ION SPUTTERING PUMP WITH GETTER MODULE</title><author>KRISCHER; GUNTHER ; ROMER; JOSEPH ; MUNDINGER; HANS-JURGEN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5221190A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1993</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BLASTING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</topic><topic>PUMPS</topic><topic>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>KRISCHER; GUNTHER</creatorcontrib><creatorcontrib>ROMER; JOSEPH</creatorcontrib><creatorcontrib>MUNDINGER; HANS-JURGEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KRISCHER; GUNTHER</au><au>ROMER; JOSEPH</au><au>MUNDINGER; HANS-JURGEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ION SPUTTERING PUMP WITH GETTER MODULE</title><date>1993-06-22</date><risdate>1993</risdate><abstract>The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. 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language	eng
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subjects	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
title	ION SPUTTERING PUMP WITH GETTER MODULE
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