ION SPUTTERING PUMP WITH GETTER MODULE

The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, i...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KRISCHER, GUNTHER, ROMER, JOSEPH, MUNDINGER, HANS-JURGEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.