CHEMISORPTIVE METAL ALLOY AND METHOD OF USING THE SAME

A chemisorptive metal alloy includes from about 30% to about 70% by weight of Ti and/or Zr and from about 30% to about 70% by weight of Cu. Optionally, the alloy may also contain from 0% to about 5% by weight of Fe; from 0% to about 10% by weight of Ni; from 0% to about 5% of V; and from 0% to about...

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Format: Patent
Sprache:eng
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Zusammenfassung:A chemisorptive metal alloy includes from about 30% to about 70% by weight of Ti and/or Zr and from about 30% to about 70% by weight of Cu. Optionally, the alloy may also contain from 0% to about 5% by weight of Fe; from 0% to about 10% by weight of Ni; from 0% to about 5% of V; and from 0% to about 5% of Cr. A method of purifying a reactive gas and removing foreign impurities therefrom includes conducting the impurities containing reactive gas, such as chlorine, hydrogen chloride, silane and dichlorosilane, through a bed of the above described pulverized metal alloy and removing the impurities from the gas by chemisorption on the alloy.