Fluorinated poly(arylene ether)

Fluorinated poly(arylene ethers) having a repeat unit such as are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.

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Bibliographische Detailangaben
Hauptverfasser: MERCER, FRANK W, SOVISH, RICHARD C
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Fluorinated poly(arylene ethers) having a repeat unit such as are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.