Fluorinated poly(arylene ether)
Fluorinated poly(arylene ethers) having a repeat unit such as are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Fluorinated poly(arylene ethers) having a repeat unit such as are useful as dielectric materials in multilayer interconnects in integrated circuit chips and multichip modules and as protective materials for chips. |
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