RADIATION-SENSITIVE MIXTURE AND PRODUCTION OF RELIEF IMAGES

RADIATION-SENSITIVE MIXTURE AND PRODUCTION OF RELIEF IMAGES

A radiation-sensitive mixture, essentially consisting of a) a binder or binder mixture which is insoluble in water but soluble in aqueous alkaline solutions, b) a compound which forms a strong acid on exposure to radiation and c) an organic compound which contains an acid-cleavable carbamate unit, i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, SON N
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A radiation-sensitive mixture, essentially consisting of a) a binder or binder mixture which is insoluble in water but soluble in aqueous alkaline solutions, b) a compound which forms a strong acid on exposure to radiation and c) an organic compound which contains an acid-cleavable carbamate unit, is suitable for the production of relief structures.