Method for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun

Apparatus and a method for generating an RF plasma plume wherein hydrogen gas is introduced downstream of the means for injecting plasma gas in order to increase the coupling between the RF coil and the plume and to decrease heat loss to the plasma containment walls.

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Bibliographische Detailangaben
Hauptverfasser:	FRIND, GERHARD, SAVKAR, SUDHIR D
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	Apparatus and a method for generating an RF plasma plume wherein hydrogen gas is introduced downstream of the means for injecting plasma gas in order to increase the coupling between the RF coil and the plume and to decrease heat loss to the plasma containment walls.