Filamentless magnetron-ion source and a process using it

Filamentless magnetron-ion source and a process using it

PCT No. PCT/EP88/01015 Sec. 371 Date Jun. 26, 1989 Sec. 102(e) Date Jun. 26, 1989 PCT Filed Nov. 10, 1988 PCT Pub. No. WO89/04546 PCT Pub. Date May 18, 1989.The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cav...

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Bibliographische Detailangaben
Hauptverfasser: MOEHL, WOLFGANG
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Zusammenfassung:PCT No. PCT/EP88/01015 Sec. 371 Date Jun. 26, 1989 Sec. 102(e) Date Jun. 26, 1989 PCT Filed Nov. 10, 1988 PCT Pub. No. WO89/04546 PCT Pub. Date May 18, 1989.The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cavity resonator, a lambda-4-short circuit slider member, ECR magnets and a quartz dome. The invention also relates to a process using the said apparatus.