Chemical vapor deposition reactor and process

A reactor having a heated liner for producing silicon by chemical vapor deposition (CVD) and means for supplying a gas stream in the turbulent flow region. A gas stream including a silicon-containing compound is passed through a deposition chamber at turbulent flow rates for deposition of silicon on...

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Bibliographische Detailangaben
Hauptverfasser: LAWRENCE, JR., WALTER W, HUGHMARK, GORDON A, DANIELS, GEORGE A, GAUTREAUX, MARCELIAN F
Format: Patent
Sprache:eng
Schlagworte:
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Zusammenfassung:A reactor having a heated liner for producing silicon by chemical vapor deposition (CVD) and means for supplying a gas stream in the turbulent flow region. A gas stream including a silicon-containing compound is passed through a deposition chamber at turbulent flow rates for deposition of silicon on a non-reactive substrate liner heated above the decomposition temperature of the silicon-containing compound. Optionally, the liner is removable from the reactor for separation of deposited metal. Also optionally, the temperature of the liner in situ may be raised above the melting point of the deposited metal for melt out and recovery.