Method of detecting a marker provided on a specimen
In a method of detecting a marker by means of an electron beam system, the detection time can be minimized for predetermined accuracy specifications by making a choice between a correlation search method and a level search method, which choice is co-determined by marker properties. The use of a corr...
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creator | VAN VUCHT ROBERTUS J. M |
description | In a method of detecting a marker by means of an electron beam system, the detection time can be minimized for predetermined accuracy specifications by making a choice between a correlation search method and a level search method, which choice is co-determined by marker properties. The use of a correction value for calculating the correlation values reduces the risk of incorrect marker identification. |
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subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING |
title | Method of detecting a marker provided on a specimen |
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