Method of detecting a marker provided on a specimen

In a method of detecting a marker by means of an electron beam system, the detection time can be minimized for predetermined accuracy specifications by making a choice between a correlation search method and a level search method, which choice is co-determined by marker properties. The use of a corr...

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Bibliographische Detailangaben
Hauptverfasser:	VAN VUCHT, ROBERTUS J. M
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	In a method of detecting a marker by means of an electron beam system, the detection time can be minimized for predetermined accuracy specifications by making a choice between a correlation search method and a level search method, which choice is co-determined by marker properties. The use of a correction value for calculating the correlation values reduces the risk of incorrect marker identification.