Topographical camera operable by applying a grid-generated Moire image onto a CCD image sensor

A camera for recording the topography of a specimen surface by generation of a Moire image with the aid of an object grid applied on the object, and which includes a CCD sensor with a reference grid (8) which is applied as a physical grid structure directly on the light incidence surface (4) of the...

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Bibliographische Detailangaben
Hauptverfasser: BERGER, CHRISTA, HOFLER, HEINRICH, FICHTER, OTMAR
Format: Patent
Sprache:eng
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Zusammenfassung:A camera for recording the topography of a specimen surface by generation of a Moire image with the aid of an object grid applied on the object, and which includes a CCD sensor with a reference grid (8) which is applied as a physical grid structure directly on the light incidence surface (4) of the CCD sensor.