Copper deposition from electroless plating bath

Copper is deposited onto a substrate by plating a first layer of copper onto the substrate from an electroless plating bath and plating a second layer of copper onto the first layer of copper from a second and different electroless plating bath. The first and second plating baths differ from each ot...

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Hauptverfasser: RICKERT, ROBERT G, JUNG, DAE Y, TISDALE, STEPHEN L, BURNETT, PETER A, MAGNUSON, ROY H, KASCHAK, RONALD A
Format: Patent
Sprache:eng
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Zusammenfassung:Copper is deposited onto a substrate by plating a first layer of copper onto the substrate from an electroless plating bath and plating a second layer of copper onto the first layer of copper from a second and different electroless plating bath. The first and second plating baths differ from each other in at least the cyanide content. The process reduces plating void defects and reduces nodule formation.