Process and apparatus for producing non-oxide compounds

A process for producing non-oxide compounds such as silicon nitride and silicon carbide by using a multi-stage apparatus constructed of a raw material drier section, a reactor section including a multiplicity of reaction vessels, and a non-oxidizing gas feeder section, is disclosed. The sections are...

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Bibliographische Detailangaben
Hauptverfasser:	NISHI, YOSHITSUGA, KAWASAKI, KENJI, YAMAGISHI, CHITAKE, HAYASHI, MUTUO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A process for producing non-oxide compounds such as silicon nitride and silicon carbide by using a multi-stage apparatus constructed of a raw material drier section, a reactor section including a multiplicity of reaction vessels, and a non-oxidizing gas feeder section, is disclosed. The sections are arranged serially in the vertical direction. Raw materials are reacted with one another while fluidizing or bubbling by a hot non-oxidizing gas (argon or nitrogen) occurs in the raw material drier section and reaction vessels.