Thin-film circuit and method of making the same

A thin-film circuit including integrated resistors and conductors. The conductors consist of two superposed Au layers having a Pd layer sandwiched between them. The conductors have a sheet resistivity of R 10 m and are solderable and bondable. The thin-film circuit is suitable for applications in th...

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Bibliographische Detailangaben
Hauptverfasser: HANISCH, HELMUT, MUELLER, SIEGFRIED
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A thin-film circuit including integrated resistors and conductors. The conductors consist of two superposed Au layers having a Pd layer sandwiched between them. The conductors have a sheet resistivity of R 10 m and are solderable and bondable. The thin-film circuit is suitable for applications in the GHz range.