High pressure sensor
PCT No. PCT/DE85/00418 Sec. 371 Date Apr. 22, 1986 Sec. 102(e) Date Apr. 22, 1986 PCT Filed Oct. 28, 1985 PCT Pub. No. WO86/02999 PCT Pub. Date May 22, 1986.The high pressure sensor includes a housing part, a lid closing the same and an intermediary disposed sensor disk. A cylindrical pressure chamb...
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Zusammenfassung: | PCT No. PCT/DE85/00418 Sec. 371 Date Apr. 22, 1986 Sec. 102(e) Date Apr. 22, 1986 PCT Filed Oct. 28, 1985 PCT Pub. No. WO86/02999 PCT Pub. Date May 22, 1986.The high pressure sensor includes a housing part, a lid closing the same and an intermediary disposed sensor disk. A cylindrical pressure chamber is formed in the housing, wherein an inner area of the sensor disk is disposed in a sealed off manner. In this area the measuring sensors are disposed in form of piezoresistive layer resistors. Layer conductors penetrate from this inner area into an outer area, wherein evaluation circuits and the evaluation electronic are disposed. The total sensor disk is provided with one or a plurality of glass layers in such a manner that a flat surface is obtained. Pressure changes of the pressure medium are picked up in the pressure chamber by the measuring sensors and are processed accordingly. Such a high pressure sensor is relatively simple and advantageous in its use. |
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