Sintered aluminum nitride semi-conductor device

A semi-conductor device comprising sintered aluminum nitride having a high thermal conductivity, which comprises at least 65% by weight of aluminum nitride, and at least one of beryllium, a beryllium compound, lithium and a lithium compound.

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Bibliographische Detailangaben
Hauptverfasser: MATSUSHITA, YASUO, OHKOSHI, TOKIO, OGIHARA, SATORU, TAKEDA, YUKIO, URA, MITSURU, ASAI, TADAMICHI, NAKAMURA, KOUSUKE, MAEDA, KUNIHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semi-conductor device comprising sintered aluminum nitride having a high thermal conductivity, which comprises at least 65% by weight of aluminum nitride, and at least one of beryllium, a beryllium compound, lithium and a lithium compound.