Detection of boron impurities in chlorosilanes

Detection of boron impurities in chlorosilanes

A method for preparing a chlorosilane sample to enable colorimetric detection of the presence of minute amounts of boron impurities is provided. Detection of boron impurities below five parts per billion is contemplated.

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Hauptverfasser: COWLES, HAROLD R, KRAY, WILLIAM D
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator COWLES
HAROLD R
KRAY
WILLIAM D
description A method for preparing a chlorosilane sample to enable colorimetric detection of the presence of minute amounts of boron impurities is provided. Detection of boron impurities below five parts per billion is contemplated.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Detection of boron impurities in chlorosilanes
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