Detection of boron impurities in chlorosilanes

A method for preparing a chlorosilane sample to enable colorimetric detection of the presence of minute amounts of boron impurities is provided. Detection of boron impurities below five parts per billion is contemplated.

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Bibliographische Detailangaben
Hauptverfasser:	COWLES, HAROLD R, KRAY, WILLIAM D
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A method for preparing a chlorosilane sample to enable colorimetric detection of the presence of minute amounts of boron impurities is provided. Detection of boron impurities below five parts per billion is contemplated.